NanoStack Transistor Architecture for CMOS 7A Node and Beyond
- Shay Reboh
- Chen Zhang
- et al.
- 2025
- VLSI Technology and Circuits 2025
Nelson Felix joined IBM in 2008 and is currently Director of Strategy and Business Development for IBM Semiconductor Research in Albany, NY. Previous to this role, Nelson held multiple management and executive positions in process research, focused on logic patterning, process, and metrology innovations supporting IBM’s leading-edge CMOS device and AI hardware roadmap. Nelson received his B.S. from the University of Massachusetts, Amherst (2002) and his Ph.D. from Cornell University (2007), both in chemical engineering, and his doctoral work centered on the characterization of novel photoresist materials for EUV. Dr. Felix is an SPIE Fellow, and he is co-inventor on over 50 patents and co-author on over 100 publications.