Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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25 results for A. Greene

Development of SiGe Indentation Process Control to Enable Stacked Nanosheet FET Technology
- - Dexin Kong
  - Daniel Schmidt
  - et al.
- 2020
- ASMC 2020
Middle of Line (MOL) Process Investigation in Ring Oscillator failure
- - Victor Chan
  - M. Bergendahl
  - et al.
- 2020
- ASMC 2020
Improved Air Spacer Co-Integrated with Self-Aligned Contact (SAC) and Contact over Active Gate (COAG) for Highly Scaled CMOS Technology
- - Kangguo Cheng
  - Chanro Park
  - et al.
- 2020
- VLSI Technology 2020
A new technique for evaluating stacked nanosheet inner spacer TDDB reliability
- - Tian Shen
  - K. Watanabe
  - et al.
- 2020
- IRPS 2020
AFM characterization for Gate-All-Around (GAA) devices
- - Mary Breton
  - Jennifer Fullam
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Self-Allancd Gate Contact (SAGC) for CMOS technology scaling beyond 7nm
- - Ruilong Xie
  - Chanro Park
  - et al.
- 2019
- VLSI Technology 2019
Gate-Cut-Last in RMG to Enable Gate Extension Scaling and Parasitic Capacitance Reduction
- - A. Greene
  - Huimei Zhou
  - et al.
- 2019
- VLSI Technology 2019
Failure isolation in ring oscillator circuit and defect detection in CMOS technology research
- - Victor Chan
  - M. Bergendahl
  - et al.
- 2019
- ASMC 2019
SiGe FinFET for practical logic libraries by mitigating local layout effect
- - G. Tsutsui
  - Huimei Zhou
  - et al.
- 2017
- VLSI Technology 2017
Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET
- - N. Loubet
  - T.B. Hook
  - et al.
- 2017
- VLSI Technology 2017