Conference paper
Dielectric isolated FinFETs on bulk substrate
Darsen Lu, Kangguo Cheng, et al.
S3S 2014
We detail the use of ring oscillators (ROs) for yield learning during the research phase of a CMOS technology generation. Failing circuits are located and classified based on electrical analysis of ROs and FETs (Field Effect Transistor) wired out from RO environments. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.
Darsen Lu, Kangguo Cheng, et al.
S3S 2014
Ruilong Xie, Chanro Park, et al.
VLSI Technology 2019
Nicolas Loubet, T. Devarajan, et al.
IEDM 2019
Victor Chan, M. Bergendahl, et al.
ASMC 2019