Publications

21 results for I. Babich

Stress and thermal expansion of β-SiC films by the vibrating-membrane method
- - B.S. Berry
  - W.C. Pritchet
  - et al.
- 2011
- Journal of Materials Research
Polymer self assembly in semiconductor microelectronics
- - C.T. Black
  - K.W. Guarini
  - et al.
- 2006
- IEDM 2006
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
- - Steven Steen
  - Sharee J. McNab
  - et al.
- 2006
- Microelectronic Engineering
Looking into the crystal ball: Future device learning using hybrid E-beam and optical lithography
- - S.E. Steen
  - S.J. McNab
  - et al.
- 2005
- Microlithography 2005
Aggressively scaled (0.143 μm ²) 6T-SRAM cell for the 32 nm node and beyond
- - D. Fried
  - J. Hergenrother
  - et al.
- 2004
- IEDM 2004
High-capacity, self-assembled metal-oxide-semiconductor decoupling capacitors
- - Charles T. Black
  - Kathryn W. Guarini
  - et al.
- 2004
- IEEE Electron Device Letters
Self-Aligned n-Channel Germanium MOSFETs With a Thin Ge Oxynitride Gate Dielectric and Tungsten Gate
- - Hulling Shang
  - Kam-Leung Lee
  - et al.
- 2004
- IEEE Electron Device Letters
Fabrication challenges for next-generation devices: Microelectromechanical systems for radio-frequency wireless communications
- - David Seeger
  - Jennifer Lund
  - et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Fabrication and Mobility Characteristics of Ultra-thin Strained Si Directly on Insulator (SSDOI) MOSFETs
- - K. Rim
  - K.K. Chan
  - et al.
- 2003
- IEDM 2003
Low voltage, scalable nanocrystal FLASH memory fabricated by templated self assembly
- - K.W. Guarini
  - C.T. Black
  - et al.
- 2003
- IEDM 2003