Interaction of middle-of-line (MOL) temperature and mechanical stress on 90nm hi-speed device performance and reliability
- K.Y. Lim
- V. Chan
- et al.
- 2005
- ESSDERC 2005
Current / Recent: STSM in Yield / characterization of 2nm Nanosheet Logic; Analog AI hardware and chiplet technologies.
Working in semiconductor industry over 20 years in IBM.
Technical leadership in FEOL integration and device teams of CMOS 90 to deep sub-micron in bulk / SOI technologies, innovative and inventive delivery of process technologies from concept to qualification to manufacturing.
Specialties include semiconductor device & integration in R&D and production, product - customer deployment, technology licensing and technical support. Extensive experience in running lots and characterization of device / inline-metrology / PLY / Health-of-line and yield data. Device, SRAM and product yield learning and improvement through Hands-on data analysis.