Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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221 results at Microelectronic Engineering

MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- - Yvan D. Galeuchet
  - Hugo Rothuizen
  - et al.
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering
Fabrication of sub-100nm dual-gate MODFETS with enhanced performance
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering
Metrology using differential phase contrast microscopy
- - Jerry C. Shaw
- 1991
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- - Hiroyuki Hiraoka
  - Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
Electron beam tester measurements of switching noise in VLSI circuits
- - Keith A. Jenkins
  - David F. Heidel
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- - S.J. Wind
  - U. Meirav
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- - Michael G. Rosenfield
  - S. Rishton
  - et al.
- 1991
- Microelectronic Engineering