Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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221 results at Microelectronic Engineering

Correlation of electromigration lifetime distribution to failure mode in dual Damascene Cu/SiLK interconnects
- - L. Gignac
  - C.-K. Hu
  - et al.
- 2003
- Microelectronic Engineering
Reduced Cu interface diffusion by CoWP surface coating
- - C.-K. Hu
  - L. Gignac
  - et al.
- 2003
- Microelectronic Engineering
Towards implementation of a nickel silicide process for CMOS technologies
- - C. Lavoie
  - F.M. D'Heurle
  - et al.
- 2003
- Microelectronic Engineering
Ultrathin HfO₂ films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
- - E. Gusev
  - C. Cabral Jr.
  - et al.
- 2003
- Microelectronic Engineering
FMR studies of CrO₂ epitaxial thin films
- - B.Z. Rameev
  - R. Yilgin
  - et al.
- 2003
- Microelectronic Engineering
Cantilevers with nano-heaters for thermomechanical storage application
- - U. Drechsler
  - N. Bürer
  - et al.
- 2003
- Microelectronic Engineering
Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile
- - M. Geissler
  - H. Schmid
  - et al.
- 2003
- Microelectronic Engineering
Deep reactive ion etching of silicon and diamond for the fabrication of planar refractive hard X-ray lenses
- - B. Nöhammer
  - C. David
  - et al.
- 2003
- Microelectronic Engineering
Switchable cantilever fabrication for a novel time-of-flight scanning force microscope
- - Dong Weon Lee
  - Michel Despont
  - et al.
- 2003
- Microelectronic Engineering
Carbon nanotubes as potential building blocks for future nanoelectronics
- - J. Appenzeller
  - R. Martel
  - et al.
- 2002
- Microelectronic Engineering