Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

221 results at Microelectronic Engineering

Microscopic mechanisms of interface state generation by electrical stress
- - J.H. Stathis
- 1993
- Microelectronic Engineering
Arrayed miniature electron beam columns
- - T.H.P. Chang
  - L.P. Muray
  - et al.
- 1993
- Microelectronic Engineering
Measurement of the effective wavelength of x-ray lithography sources
- - Juan R. Maldonado
  - Inna Babich
  - et al.
- 1993
- Microelectronic Engineering
"Laser cleaning" removes particles from surfaces
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1993
- Microelectronic Engineering
Reactive ion etching of InAlAs with Ar/Cl₂ mixtures for ridge waveguide lasers
- - R. Germann
  - S. Hausser
  - et al.
- 1993
- Microelectronic Engineering
Hot-electron dynamics in SiO₂ and the degradation of the Si/SiO₂-interface
- - E. Cartier
  - D.J. DiMaria
- 1993
- Microelectronic Engineering
SiGe-base bipolar transistors for cryogenic BiCMOS applications
- - John D. Cressler
- 1992
- Microelectronic Engineering
Picosecond backside optical detection of internal signals in flip-chip mounted silicon VLSI circuits
- - H. Heinrich
  - N. Pakdaman
  - et al.
- 1992
- Microelectronic Engineering
Optical analysis of wet chemically etched InGaAs/InP wires
- - B. Jacobs
  - M. Emmerling
  - et al.
- 1992
- Microelectronic Engineering
Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering