Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Laser-induced removal of particles from surfaces was demonstrated. Such "laser cleaning" can be performed on the bare contaminated surface or with additional micronthickness liquid film coverage on the surface. With the latter "steam laser cleaning" we achieved removal of epoxy, alumina, silicon, and gold particles of size 0.1 μm to 10 μm from silicon surfaces. The proposed mechanism of particle ejection is described. © 1993.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993