Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

221 results at Microelectronic Engineering

Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- - Juan R. Maldonado
  - Ron DellaGuardia
  - et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- - D.J. DiMaria
- 1995
- Microelectronic Engineering
A new mask lithography tool for advanced mask manufacturing
- - B.J. Grenon
  - H.C. Hamaker
  - et al.
- 1995
- Microelectronic Engineering
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- - D. Prongue ́
  - H. Rothuizen
  - et al.
- 1995
- Microelectronic Engineering
Micromechanical structures for data storage
- - T.C. Reiley
  - L.-S. Fan
  - et al.
- 1995
- Microelectronic Engineering
High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- - P. Unger
  - V. Boegli
  - et al.
- 1994
- Microelectronic Engineering
Using simulation to analyze integrated tool performance in semiconductor manufacturing
- - John Mauer
  - Roland Schelasin
- 1994
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1994
- Microelectronic Engineering
SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- - Abram Jakubowicz
  - Albert Oosenbrug
- 1994
- Microelectronic Engineering