Frank R. Libsch, Hiroyuki Mori
ECTC 2023
We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed.
Frank R. Libsch, Hiroyuki Mori
ECTC 2023
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FMS 2023
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VLSI Technology 2023