Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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15 results at ECS Meeting 2008

Critical aspects of chemical etch patterning of magnetic tunnel junction-based MRAM
- - E.J.M. O'Sullivan
  - D.W. Abraham
- 2008
- ECS Meeting 2008
Evaluation of barrier CMP slurries and characterization of ULK material properties shifts due to CMP
- - Wei-Tsu Tseng
  - Dimitri Kioussis
  - et al.
- 2008
- ECS Meeting 2008
Silicide challenges for 22nm technologies and beyond
- - Paul R. Besser
  - Christian Lavoie
  - et al.
- 2008
- ECS Meeting 2008
Material and integration issues for rare-Earth Silicides as gate and diffusion contacts in advanced CMOS
- - C. D'Emic
  - K. Ohuchi
  - et al.
- 2008
- ECS Meeting 2008
Engineering high dielectric constant materials for band-edge CMOS applications
- - H. Jagannathan
  - V. Narayanan
  - et al.
- 2008
- ECS Meeting 2008
Gate dielectrics for high mobility semiconductors
- - A. Dimoulas
  - Y. Panayiotatos
  - et al.
- 2008
- ECS Meeting 2008
Morphology of electrodeposited Cu on 300 mm PEALD Ru substrates
- - J. Kelly
  - T. Vo
  - et al.
- 2008
- ECS Meeting 2008
High-K gate dielectric structures by atomic layer deposition for the 32nm and beyond nodes
- - R.D. Clark
  - S. Consiglio
  - et al.
- 2008
- ECS Meeting 2008
PEALD Ru liner conformality and Cu trench fill characteristics
- - O. Van Der Straten
  - J. Wynne
  - et al.
- 2008
- ECS Meeting 2008
Effect of ion implantation and anneals on fully-strained SiC and SiC:P films using multiple characterization techniques
- - A. Madan
  - J. Li
  - et al.
- 2008
- ECS Meeting 2008