Publications

509 results at JES

High Selectivity Magnetically Enhanced Reactive Ion Etching of Boron Nitride Films
- - Bernhard Neureither
  - Son Nguyen
  - et al.
- 1994
- JES
Electrochemically Deposited Diffusion Barriers
- - Milan Paunovic
  - Robert G. Schad
  - et al.
- 1994
- JES
X-Ray Absorption Study of Electrochemically Grown Oxide Films on AlCr Sputtered Alloys
- - A.J. Davenport
  - H.S. Isaacs
  - et al.
- 1994
- JES
The C49 to C54 Phase Transformation in TiSi²Thin Films
- - L. Clevenger
  - R. Mann
- 1994
- JES
Shallow n⁺ Junctions in Silicon by Arsenic Gas-Phase Doping
- - J.F. DeGeolormo
  - D.K. Sodana
  - et al.
- 1994
- JES
In Situ Surface Exafs Study of an Underpotentially Deposited Silver Monolayer on Gold (111)
- - Mahesh G. Samant
  - Gary Borges
  - et al.
- 1993
- JES
Fabrication of Tungsten Local Interconnect for VLSI Bipolar Technology
- - N.J. Mazzeo
  - J.D. Warnock
  - et al.
- 1993
- JES
On the Pitting Resistance of Sputter-Deposited Aluminum Alloys
- - R.C. Newman
  - C.V. Jahnes
  - et al.
- 1993
- JES
Chemical Vapor Deposited Copper from Alkyne Stabilized Copper (I) Hexafluoroacetylacetonate Complexes
- - Thomas H. Baum
  - Carl E. Larson
- 1993
- JES
Growth Rate Enhancement of Heavy n- and P-Type Doped Silicon Deposited by Atmospheric-Pressure Chemical Vapor Deposition at Low Temperatures
- - P. Agnello
  - T.O. Sedgwick
  - et al.
- 1993
- JES