Publications

221 results at Microelectronic Engineering

Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- - R. Viswanathan
  - David Seeger
  - et al.
- 1994
- Microelectronic Engineering
SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- - Abram Jakubowicz
  - Albert Oosenbrug
- 1994
- Microelectronic Engineering
High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- - P. Unger
  - V. Boegli
  - et al.
- 1994
- Microelectronic Engineering
Microscopic mechanisms of interface state generation by electrical stress
- - J.H. Stathis
- 1993
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1993
- Microelectronic Engineering
Measurement of the effective wavelength of x-ray lithography sources
- - Juan R. Maldonado
  - Inna Babich
  - et al.
- 1993
- Microelectronic Engineering
Hot-electron dynamics in SiO₂ and the degradation of the Si/SiO₂-interface
- - E. Cartier
  - D.J. DiMaria
- 1993
- Microelectronic Engineering
Reactive ion etching of InAlAs with Ar/Cl₂ mixtures for ridge waveguide lasers
- - R. Germann
  - S. Hausser
  - et al.
- 1993
- Microelectronic Engineering
"Laser cleaning" removes particles from surfaces
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1993
- Microelectronic Engineering
Arrayed miniature electron beam columns
- - T.H.P. Chang
  - L.P. Muray
  - et al.
- 1993
- Microelectronic Engineering