Publications

19 results for Jyotica V. Patel

Patternable low-κ material for "greener" semiconductor manufacturing
- - Qinghuang Lin
  - Shyng-Tsong Chen
  - et al.
- 2010
- ICSICT 2010
Multi-level integration of patternable low-κ material into advanced Cu BEOL
- - Qinghuang Lin
  - Shyng-Tsong Chen
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Integration of photo-patternable low-κ material into advanced Cu back-end-of-the-line
- - Qinghuang Lin
  - Alshakim Nelson
  - et al.
- 2010
- Japanese Journal of Applied Physics
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Upside-down FETS
- - D.C. La Tulipe Jr.
  - D.J. Frank
  - et al.
- 2008
- IEEE International SOI Conference 2008
Silicon-on-insulator MOSFETs with hybrid crystal orientations
- - M. Yang
  - K.K. Chan
  - et al.
- 2006
- VLSI Technology 2006
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
- - Steven Steen
  - Sharee J. McNab
  - et al.
- 2006
- Microelectronic Engineering
Enabling SOI-based assembly technology for three-dimensional (3D) integrated circuits (ICs)
- - A. Topol
  - D.C. La Tulipe
  - et al.
- 2005
- IEDM 2005
Looking into the crystal ball: Future device learning using hybrid E-beam and optical lithography
- - S.E. Steen
  - S.J. McNab
  - et al.
- 2005
- Microlithography 2005