Publication
VLSI Technology 2006
Conference paper
Silicon-on-insulator MOSFETs with hybrid crystal orientations
Abstract
Novel silicon-on-insulator (SOI) structures are presented on hybrid orientation substrates (SuperHOT), i.e. with nFETs on (100) surface orientation and pFETs on (110) orientation, using silicon lateral overgrowth. Functional SOI MOSFETs and ring oscillators are demonstrated. © 2006 IEEE.