Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping

Abstract

The authors report on a hybrid lithography process that integrates electron beam lithography (EBL) and optical photolithography. To maximize resolution and density, the EBL exposure is performed using a hydrogen silsesquioxane-based resist, while the photolithographic exposure is performed using standard positive or negative tone 248 nm photoresists. Both exposures take place on a common underlayer consisting of an antireflective coating (ARC). During pattern transfer into the ARC layer, a composite image of the two lithographic exposures is formed creating a robust and versatile etch mask for further pattern transfer into the substrate. They demonstrate the utility of this technique by using it to pattern the active, gate, and wiring levels of complementary metal oxide semiconductor devices and circuits consisting of trigated Fin-based field effect transistors. These devices have a minimum active area pitch of 50 nm, minimum gate pitch of 90 nm, and achieve densities suitable for 15 nm node static random access memory cells. Details of the exposure process and device fabrication are discussed along with electrical results from the resulting devices and circuits built using this technique. © 2009 American Vacuum Society.