Publications

9 results for Bang To

Sub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly
- - Hsin-Yu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
A 0.021 μm² trigate SRAM cell with aggressively scaled gate and contact pitch
- - Michael A. Guillorn
  - Josephine Chang
  - et al.
- 2011
- VLSI Technology 2011
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Trigate 6T SRAM scaling to 0.06 μm²
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- IEDM 2009
Plasma etching of nanometer-scale self-assembled features
- - Ying Zhang
  - Charles T. Black
  - et al.
- 2008
- ISTC 2008
FinFET performance advantage at 22nm: An AC perspective
- - M. Guillorn
  - J. Chang
  - et al.
- 2008
- VLSI Technology 2008
Investigation of FinFET devices for 32nm technologies and beyond
- - H. Shang
  - L. Chang
  - et al.
- 2006
- VLSI Technology 2006
High Performance CMOS Fabricated on Hybrid Substrate with Different Crystal Orientations
- - M. Yang
  - M. Ieong
  - et al.
- 2003
- IEDM 2003
Fabrication and Mobility Characteristics of Ultra-thin Strained Si Directly on Insulator (SSDOI) MOSFETs
- - K. Rim
  - K.K. Chan
  - et al.
- 2003
- IEDM 2003