PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperSummary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafersJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jul 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsM. LiehrS. GatesJ. O'SullivanG.W. RubloffB.A. MeyersonIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
