Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
The phenomenon of metastable phase formation during a constant temperature and constant pressure thin film reaction is explained by a kinetic model emphasizing the rate of transition. It is assumed that the reaction obeys a maximum time-dependent rather than time-independent negative free energy change. The product persists in the metastable state due to a high activation barrier to later transition. © 1991.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry