Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- M. Liehr
- S. Gates
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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2 results for B.A. Meyerson
Homogeneous chemical vapor deposition
- B.A. Scott
- W.L. Olbricht
- et al.
- 1984
- JVSTA