Publication
ESSDERC 1993
Conference paper

SOI technology outlook for Sub-0.25 μm CMOS, challenges and opportunities

Abstract

In this paper, the outlook for the SOI technology in the sub-0.25 μm CMOS regime is discussed. The key challenges and opportunities for the SOI technology on the road to becoming a main stream semiconductor technology are presented.

Date

Publication

ESSDERC 1993

Authors

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