Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
In this paper we study the limit cycles which can bifurcate from the periodic orbits of the center located at the origin of the quadratic polynomial di®erential system x = -y(1+x), y= x(1+x), and of the cubic polynomial di®erential system x = -y(1-x2-y2), y= x(1-x 2-y2), when we perturb them in the class of all polynomial vector fields with quadratic and cubic homogenous nonlinearities, respectively. For doing this study we use the averaging theory. Copyright © 2011 Watam Press.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Mario Blaum, John L. Fan, et al.
IEEE International Symposium on Information Theory - Proceedings
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004