PaperNon-thermal effects in laser-enchanced etching of silicon by XeF2F.A. HouleChemical Physics Letters
PaperNonadiabaticity in ion-molecule reactions: Coupling of proton and charge transfer in the H2+ and D2+ Ar systemF.A. Houle, S.L. Anderson, et al.The Journal of Chemical Physics
PaperProduct volatilization as a probe of the physics and chemistry of latent image formation in chemically amplified resistsW.D. Hinsberg, F.A. Houle, et al.Journal of Physical Chemistry A
PaperQuantification of outgassing of C-, Si-, and S-containing products during exposure of photoresistsF.A. Houle, N. Maxim, et al.Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
