F.A. Houle, K.A. Singmaster
Journal of Physical Chemistry
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
F.A. Houle, K.A. Singmaster
Journal of Physical Chemistry
C.R. Moylan, T.H. Baum, et al.
Applied Physics A Solids and Surfaces
F.A. Houle, W.D. Hinsberg, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
W.D. Hinsberg, F.A. Houle, et al.
J. Photopolym. Sci. Tech.