G.M. Gallatin, F.A. Houle, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
G.M. Gallatin, F.A. Houle, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Harold F. Winters, F.A. Houle
Journal of Applied Physics
F.A. Houle, W.D. Hinsberg, et al.
ACS Spring 1999
M.I. Sanchez, W.D. Hinsberg, et al.
SPIE Advances in Resist Technology and Processing 1999