Skip to main content
Research
Focus areas
Blog
Publications
Careers
About
Back
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Back
About
Overview
Labs
People
Back
Semiconductors
Back
Artificial Intelligence
Back
Quantum Computing
Back
Hybrid Cloud
Back
Overview
Back
Labs
Back
People
Research
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Blog
Publications
Careers
About
Overview
Labs
People
Open IBM search field
Close
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
17 Mar 2004
Acid-base reactions in a positive tone chemically amplified photoresist and their effect on imaging
View publication
Abstract
No abstract available.
Related
Paper
Change Detection from Remote Sensing to Guide OpenStreetMap Labeling
Paper
Numerical investigation of respiratory drops dynamics released during vocalization
Paper
Nonbenzenoid High-Spin Polycyclic Hydrocarbons Generated by Atom Manipulation
Paper
Imaging titan's organic haze at atomic scale
View all publications
