PublicationGBC 2006Conference paperCritical aspects of layer transfer and alignment tolerances for 3D integration processesGBC 2006AbstractNo abstract available.Home↳ PublicationsDate01 Dec 2006PublicationGBC 2006AuthorsD.C. La TulipeL.T. ShiA. TopolD.J. FrankS.E. SteenD. PfeifferD. PosillicoD. NeumayerS. GomaJ. VichicontiJ. RubinoA. YoungG. SingcoM. IeongIBM-affiliated at time of publicationShare
