Applications of synchrotron X-rays in microelectronics industry research
- Jean L. Jordan-Sweet
- Christophe Detavernier
- et al.
- 2005
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publications
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18 results at Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Fabrication of optical waveguides by 2 MeV Ar+ irradiation of germanium-doped flame-hydrolysis deposited silica
- S. García-Blanco
- A.J. Kellock
- et al.
- 2003
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Ion beam alignment for liquid crystal display fabrication
- J. Doyle
- P. Chaudhari
- et al.
- 2003
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Soft X-ray magnetic scattering as a probe of recording media
- Eric E. Fullerton
- O. Hellwig
- et al.
- 2003
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Magnetism in heterogeneous thin film systems: Resonant X-ray scattering studies
- J.B. Kortright
- J.S. Jiang
- et al.
- 2003
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Crack dynamics in brittle fracture: An atomistic study
- Farid F. Abraham
- 2001
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Controlling nickel silicide phase formation by Si implantation damage
- M. Guihard
- P. Turcotte-Tremblay
- et al.
- 2009
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Nuclear reaction analysis of 1H and 2H in hafnium silicate films on Si
- C. Driemeier
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Post deposition annealing of Hf aluminate films on Si investigated by ion backscattering and nuclear reaction analyses
- L. Miotti
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
An analytical energy-loss line shape for high depth resolution in ion-beam analysis
- P.L. Grande
- A. Hentz
- et al.
- 2007
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms