Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

(100) and (111) Ni films epitaxially grown on Cu by the metal-metal epitaxy on silicon technique near room temperatures
- - Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamics of the interaction of ethane with lr(110)-(1 x2)
- - W.H. Weinberg
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray reflectivity study of Si0₂on Si
- - A.A. Bright
  - G.W. Rubioff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface
- - P. Martensson
  - R.M. Feenstra
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Si₂Cl₆and Si₂H₆adsorption on CaF₂/Si(111)
- - L.J. Terminello
  - F.J. Himpsel
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion energy measurements at the surface of an ion cyclotron range of frequencies antenna faraday shield
- - D.J. Hoffman
  - R.A. Langley
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An aerosol model of particle generation during pressure reduction
- - J.J. Wu
  - Douglas W. Cooper
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Slope control of molybdenum lines etched with reactive ion etching
- - Yue Kuo
  - J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A study of voids in sputtered Si02
- - Mitchell J. Hait
  - Harris C. Jones
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation of new solid phases from chemical interactions at an interface
- - F.M. Heurle
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films