Synchrotron radiation x-ray lithography: Recent results
- Jerome P. Silverman
- Rolf P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Publications
233 results at Proceedings of SPIE 1989
Optimization of the optics matching a storage ring to an X-ray lithography camera
- Rolf P. Haelbich
- 1989
- Proceedings of SPIE 1989
The writing mechanism for discontinuous metal films
- Victor B. Jipson
- 1989
- Proceedings of SPIE 1989
Pulse Width Transfer Function of Tellurium -Alloy Disks
- M. Chen
- V. Marrello
- 1989
- Proceedings of SPIE 1989
Characterization of optical recording disk noise
- M. Chen
- A.E. Bell
- et al.
- 1989
- Proceedings of SPIE 1989
Subbing layer surface energy effects on the writing and degradation characteristics of Те and Те-alloy optical recording media
- C.R. Davis
- W.-Y. Lee
- et al.
- 1989
- Proceedings of SPIE 1989
Thin te and te alloy films for optical data storage
- Wen-Yaung Lee
- 1989
- Proceedings of SPIE 1989
Solid state electron beam chemistry
- J. Pacansky
- 1989
- Proceedings of SPIE 1989
X-ray lithography exposures using synchrotron radiation
- Jerome P. Silverman
- Rolf P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Large-angle optically induced light deflection
- Glenn T. Sincerbox
- Gerald Roosen
- 1989
- Proceedings of SPIE 1989