Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- - Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma induced gas heating in electron cyclotron resonance sources
- - S.M. Rossnagel
  - S.J. Whitehair
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nanomechanics of a Au-lr contact using a bidirectional atomic force microscope
- - Sidney R. Cohen
  - Gabi Neubauer
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- - Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Process effects on radio frequency diode reactively sputtered ZrO₂films
- - M.M. Yang
  - T.M. Reith
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Spontaneous decomposition of dimethyl gold hexafluoroacetylacetonate on ion bombarded surfaces
- - A. Wagner
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics and mechanics of Si₂H₆ surface decomposition on Si
- - C.M. Greenlief
  - H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching of silicon using bromine containing plasmas
- - Tim D. Bestwick
  - Gottlieb S. Oehrlein
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Epitaxial growth of silicon on Si(001) by scanning tunneling microscopy
- - R.J. Hamers
  - J.E. Demuth
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Lateral dopant profiling on a 100 nm scale by scanning capacitance microscopy
- - C.C. Williams
  - J. Slinkman
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films