Selective dry etching of germanium with respect to silicon and vice versa
- G.S. Oehrlein
- T.D. Bestwick
- et al.
- 2019
- JES
Publications
509 results at JES
The Analysis of Diffusion Data by a Method of Moments
- R. Ghez
- J.D. Fehribach
- et al.
- 2019
- JES
Maskless Laser Patterning for Gold Plating of Microelectronic Materials
- R.J. von Gutfeld
- M.H. Gelchinski
- et al.
- 2019
- JES
Initiation of electroless copper plating using Pd+2/poly(acrylic acid) films
- Robert L. Jackson
- 2019
- JES
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
Vapor Phase Deposition of Palladium for Electroless Copper Plating
- Richard R. Thomas
- Jae M. Park
- 2019
- JES
Sidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
Pitting of Sputtered Aluminum Alloy Thin Films
- G.S. Frankel
- Michael A. Russak
- et al.
- 2019
- JES
Laser-Assisted Etching of Manganese-Zinc-Ferrite
- Brian W. Hussey
- Arunava Gupta
- et al.
- 2019
- JES
Corrosion and Passivation of Fe and FeN Films
- V. Brusic
- G.S. Frankel
- et al.
- 2019
- JES