Publications

2 results for E.W. Eckstein

Elemental composition profiling in thin films by glow-discharge mass spectrometry: Depth resolution
- - J.W. Coburn
  - E.W. Eckstein
  - et al.
- 2008
- Journal of Applied Physics
Diagnostics of an r.f. sputtering glow discharge - correlation between atomic absorption and mass spectrometry
- - E.W. Eckstein
  - J.W. Coburn
  - et al.
- 1975
- International Journal of Mass Spectrometry and Ion Physics