J.W. Coburn, Eric Kay
Journal of Applied Physics
The depth resolution of a nickel-copper interface has been measured as a function of the total depth of analysis using the glow-discharge mass-spectrometric depth-profiling technique. A possible interpretation of the results is that the depth resolution is determined by a 30-Å depth-independent interface broadening plus a broadening which varies between 2 and 8% of the total depth of analysis.
J.W. Coburn, Eric Kay
Journal of Applied Physics
K. Köhler, D.E. Horne, et al.
Journal of Applied Physics
J.W. Coburn, E. Taglauer, et al.
Japanese Journal of Applied Physics
K. Köhler, J.W. Coburn, et al.
Journal of Applied Physics