Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
Publications
32 results for I. Haller
Polymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
Selective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
The Polycrystalline-Si Contact to GaAs
- P.D. Kirchner
- J.M. Woodall
- et al.
- 2019
- JES
Ionic species in a silane plasma
- Ivan Haller
- 2008
- Applied Physics Letters
Simple high sensitivity microbalance for use in ultra-high vacuum
- I. Haller
- P. White
- 2004
- Review of Scientific Instruments
Vibrational spectra and molecular structure of bicyclo[1.1.0]butane
- Ivan Haller
- R. Srinivasan
- 2004
- The Journal of Chemical Physics
Photochemistry of 1,3-butadiene: Details of the primary processes and mechanism of photopolymerization
- I. Haller
- R. Srinivasan
- 2004
- The Journal of Chemical Physics
Kinetics and mechanism of the photochemical valence tautomerization of hexafluorobenzene
- Ivan Haller
- 2004
- The Journal of Chemical Physics
Alignment and wetting properties of nematic liquids
- Ivan Haller
- 2003
- Applied Physics Letters