Ivan Haller
JACS
The abundances Aj of groups of higher silane ions Si jH+k were measured mass spectrometrically in an rf glow discharge in SiH4 under conditions used for preparation of hydrogenated amorphous silicon. The ratio Aj/Aj-1 is about 0.3 nearly independently of j, of pressure, of degree of ionization, and of rf power. The mean hydrogen to silicon ratio for j≥3 is 1.5±0.1 and pressure independent in the 0.017-0.100-Torr range. A mechanism postulating charge or hydride ion transfer and the addition of SiH4 as the most rapid reactions of silane ions is consistent with the observations.
Ivan Haller
JACS
Ivan Haller
Journal of Physical Chemistry
Ivan Haller
Progress in Solid State Chemistry
Ivan Haller, R. Srinivasan
The Journal of Chemical Physics