Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results for Alain C. Diebold

Electrical enhancement and higher-k engineering in ultra-thin atomic layer deposited Hf_1-xAl_xO_y films
- - K. Tapily
  - S. Consiglio
  - et al.
- 2014
- ECS J. Solid State Sci. Technol.
Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO₂and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
- - Steven Consiglio
  - Kandabara Tapily
  - et al.
- 2014
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf _1-xZr_xO₂ gate dielectrics deposited by a cyclical deposition and annealing scheme
- - Relja Vasić
  - Steven Consiglio
  - et al.
- 2013
- Journal of Applied Physics
Effects of stress on the dielectric function of strained pseudomorphic Si _1-xGe _x alloys from 0 to 75 Ge grown on Si (001)
- - Gangadhara Raja Muthinti
  - Manasa Medikonda
  - et al.
- 2012
- Journal of Applied Physics