Surface-topography simulations of ionized sputter metal deposition
- S. Hamaguchi
- S.M. Rossnagel
- 1995
- MRS Spring Meeting 1995
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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34 results for Satoshi Hamaguchi
Ponderomotive force and ion energy distributions in an rf sheath
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1992
- Physical Review Letters
Dynamics of charged particulates in plasmas
- S. Hamaguchi
- R.T. Farouki
- 1994
- ICOPS 1994
The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions
- Jonathan Tennyson
- Sebastian Mohr
- et al.
- 2022
- Plasma Sources Science and Technology
Triple point of Yukawa systems
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1997
- Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
Across-wafer nonuniformity of long throw sputter deposition
- A. Mayo
- S. Hamaguchi
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Numerical simulation of etching and deposition processes
- Satoshi Hamaguchi
- Anita A. Mayo
- et al.
- 1997
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Phase diagram of Yukawa systems near the one-component-plasma limit revisited
- S. Hamaguchi
- R.T. Farouki
- et al.
- 1996
- Journal of Chemical Physics
Thin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
- S.M. Rossnagel
- C. Nichols
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Liner conformality in ionized magnetron sputter metal deposition processes
- S. Hamaguchi
- S.M. Rossnagel
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures