Publications

9 results for Theo Frot

Using Unentangled Oligomers to Toughen Materials
- - Scott G. Isaacson
  - Yusuke Matsuda
  - et al.
- 2018
- ACS AMI
Hyperconnected molecular glass network architectures with exceptional elastic properties
- - Joseph A. Burg
  - Mark S. Oliver
  - et al.
- 2017
- Nature Communications
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- - Robert Bruce
  - Sebastian Engelmann
  - et al.
- 2013
- Journal of Physics D: Applied Physics
Impact of low-k structure and porosity on etch processes
- - Maxime Darnon
  - Nicolas Casiez
  - et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Post Porosity Plasma Protection applied to a wide range of ultra low-k materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2012
- IITC 2012
Post porosity plasma protection: Scaling of efficiency with porosity
- - Theo Frot
  - Willi Volksen
  - et al.
- 2012
- Advanced Functional Materials
Post Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2011
- IITC/MAM 2011
Future of PECVD and spin-on ultra low-k materials
- - Willi Volksen
  - Theo Frot
  - et al.
- 2011
- IITC/MAM 2011
Application of the protection/deprotection strategy to the science of porous materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2011
- Advanced Materials