Publications

50 results for K.Y. Lee

Electrical characterization of Si/Si_0.7Ge_0.3 quantum well wires fabricated by low damage CF₄ reactive ion etching
- - K.Y. Lee
  - S.J. Koester
  - et al.
- 1997
- Microelectronic Engineering
Weak localization in back-gated S quantum-well wires fabricated by reactive ion etching
- - S.J. Koester
  - K. Ismail
  - et al.
- 1996
- Physical Review B - CMMP
Copper migration and precipitate dissolution in aluminum/copper lines during electromigration testing
- - T.M. Shaw
  - C.-K. Hu
  - et al.
- 1996
- MRS Spring Meeting 1996
Electromigration drift velocity in Al-alloy and Cu-alloy lines
- - C.-K. Hu
  - K.Y. Lee
  - et al.
- 1996
- JES
Electron beam technology - SEM to microcolumn
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Microelectronic Engineering
High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- - D.M. Tanenbaum
  - C.W. Lo
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electron-beam microcolumns for lithography and related applications
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Microcolumn based low energy e-beam writing
- - C. Stebler
  - M. Despont
  - et al.
- 1996
- Microelectronic Engineering
Experimental evaluation of a 20×20 mm footprint microcolumn
- - E. Kratschmer
  - H.S. Kim
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electron-beam microcolumn technology and applications
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1995
- SPIE Optical Science, Engineering, and Instrumentation 1995