Electrical properties of vacuum annealed Si surfaces
- J. Werner
- M. Renier
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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2 results for G.S. Scilla
Dopant redistribution at Si surfaces during vacuum anneal
- M. Liehr
- M. Renier
- et al.
- 1987
- Journal of Applied Physics