XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

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Reciprocity between the reflection electron microscope and the low-loss scanning electron microscope

Oliver C. Wells

Applied Physics Letters

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Magnetically filtered low-loss scanning electron microscopy

Oliver C. Wells, Francoise K. LeGoues, et al.

Applied Physics Letters

Conference paper

Applications of image diagnostics to metrology quality assurance and process control

John A. Allgair, Victor V. Boksha, et al.

SPIE Advanced Microelectronic Manufacturing 2003

Paper

Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope

Oliver C. Wells, L. Gignac, et al.

Scanning

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Abstract

Related

Reciprocity between the reflection electron microscope and the low-loss scanning electron microscope

Magnetically filtered low-loss scanning electron microscopy

Applications of image diagnostics to metrology quality assurance and process control

Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope