Examining deep holes by rocking the beam in the scanning electron microscope

Abstract

The beam-rocking method in the scanning electron microscope can show either the inner surface of a deep hole or the outer surface of a parallel-sided pillar in ways that are not possible when scanning in the usual way. This has been demonstrated using test samples of both kinds. It is believed that this method can be successfully applied to examine deep holes and narrow pillars of micrometer dimensions by applying computer control and data analysis techniques of the kind that are used in automated semiconductor fabrication and/or metrology systems. © 1996 American Institute of Physics.