Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present experimental data and theoretocal studies which support the hypothesis that bipolarons are the charge carriers responsible for the conductivity of polypyrrole. A consistent model emerges from consideration of earlier transport, ESR, photoelectron spectroscopy and optical absorption results. © 1984.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
T.N. Morgan
Semiconductor Science and Technology
J.K. Gimzewski, T.A. Jung, et al.
Surface Science