Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The effect of elevated pressure on backbone conformation in a series of symmetrically substituted poly(di-n-alkylsilanes) has been investigated using UV-vis, Raman, and FTIR spectroscopy. Initially at low pressures, lateral compression occurs, which gives rise to gross changes in conformation, e.g., a change from a helical to a planar zigzag structure. This is manifested by a dramatic red shift of UV absorption bands by as much as 50 nm. At high pressures axial compression occurs, which leads to a geometrical distortion of the σ-conjugated backbone, which in turn causes a reversible continuous blue shift of UV absorption bands. Raman measurements at ambient and elevated pressures support these results. © 1991, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Lawrence Suchow, Norman R. Stemple
JES
R. Ghez, M.B. Small
JES
J. Tersoff
Applied Surface Science