Conference paper
Laser annealing in CMOS manufacturing
Oleg Gluschenkov, H. Jagannathan
ECS Meeting 2018
We report record low 8.4 × 10-10Ω-cm2 n-type S/D contact resistivity with laser-induced solid/liquid phase epitaxy of Si
Oleg Gluschenkov, H. Jagannathan
ECS Meeting 2018
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