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Applied Physics Letters
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Spatially resolved Raman spectroscopy of a step graded Ge xSi1-x strain relief structure

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Abstract

The structure of a strain relief region between a Si substrate and a low dislocation density Ge film has been measured by Raman spectroscopy. The composition of the structure has been determined with ≅1000 Å resolution in the growth direction, and the upper portions shown to be largely relaxed. The presence of microscopic inhomogeneities in these alloys is suggested.

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Applied Physics Letters

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