Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Epitaxial (100) thin films of CrO2 were fabricated by chemical vapour deposition technique onto TiO2 (100) single-crystal substrates. X-band (9.5GHz) ferromagnetic resonance studies reveal that magnetic anisotropy parameters in the series prepared using CrO2Cl 2 liquid precursor show only slight variations with thickness, contrary to their strong dependence observed in the CrO3-based films. The different behaviour was attributed to different morphologies of the films prepared using solid and liquid precursors. © 2003 Elsevier B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025