William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The application of ab initio molecular dynamics simulation to bulk molecular systems is reviewed with emphasis on the density functional treatment of intermolecular interactions. Examples discussed are water, hydrogen fluoride, benzene, and sulphuric acid.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Hiroshi Ito, Reinhold Schwalm
JES
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
A. Gangulee, F.M. D'Heurle
Thin Solid Films