M. Hargrove, S.W. Crowder, et al.
IEDM 1998
We report the formation and directed self-assembly of sub-10 nm half-pitch line patterns from lamellar microdomains of a block copolymer hybrid. The hybrid, which is a mixture of poly(styrene-b-ethylene oxide) (PS-b-PEO) and a low molecular weight organosilicate (OS), shows strong segregation between two phases (i.e. PS and PEO+OS) and forms lamellar microdomains of down to approximately 7 nm in half-pitch. Patterns applicable to multifinger device layouts are created by self-assembling the hybrid on topographic pre-patterns with a chemically non-selective surface. With careful design of the guiding topographic pattern geometry, well-controlled lateral placement including bent structures of lamellar microdomains can be obtained by this approach. © IOP Publishing Ltd.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Imran Nasim, Melanie Weber
SCML 2024
Sung Ho Kim, Oun-Ho Park, et al.
Small
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials