High-performance sub-0.08 μm CMOS with dual gate oxide and 9.7 ps inverter delay

We report a high-performance CMOS operating at 1.5 V with 11.9 ps nominal inverter delay at 0.06/0.08 μm Leff for NMOS and PMOS. Both NMOS and PMOS devices, with 3.6 nm inversion Tox, have the best current drive reported to date at fixed Ioff. Low-Vt NMOS/PMOS achieved with compensation and with no degradation in short-channel behavior result in nominal 9.7 ps inverter delay. These devices are incorporated in a 0.18 μm technology that offers a 4.2 μm2 SRAM cell and dual gate oxide for interfacing to 2.5 V.